Inventor · disambiguated record

Kyu Kab Rhe

Also filed as: RHE KYU KAB

1 granted patent·1 citations·filing 2014–2014

16Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0166US9927717B2Inspection method and apparatus, and lithographic apparatusASML NETHERLANDS BV·Filed 2014·Granted Mar 27, 2018·1 cites·20 claims

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