Inventor · disambiguated record

Kuo-Tsai Kao

Also filed as: KAO KUO-TSAI

1 granted patent·3 citations·filing 2000–2000

21Inventor score

Technology areasH01J

Files withMOSEL VITELIC INC1

Top patents by PatentIndex Score

1 record

0151US6403489B1Method for removing polymer stacked on a lower electrode within an etching reaction chamberMOSEL VITELIC INC·Filed 2000·Granted Jun 11, 2002·3 cites·7 claims

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