Inventor · disambiguated record
Tatsuo Shiotsuki
Also filed as: SHIOTSUKI TATSUO
3 granted patents·142 citations·filing 1993–2011
70Inventor score
Top patents by PatentIndex Score
3 records- 0186US5383984APlasma processing apparatus etching tunnel-typeTOKYO ELECTRON LTD·Filed 1993·Granted Jan 24, 1995·137 cites·12 claims
- 0268US8704367B2Semiconductor device and manufacturing method of semiconductor deviceMIGITA TATSUO·Filed 2011·Granted Apr 22, 2014·4 cites·11 claims
- 0352US8759971B2Semiconductor apparatusHOSOKAWA RYUJI·Filed 2011·Granted Jun 24, 2014·1 cites·16 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →