Inventor · disambiguated record

Kazutugu Aoki

Also filed as: AOKI KAZUTUGU

1 granted patent·137 citations·filing 1993–1993

54Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0186US5383984APlasma processing apparatus etching tunnel-typeTOKYO ELECTRON LTD·Filed 1993·Granted Jan 24, 1995·137 cites·12 claims

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