Inventor · disambiguated record

Junichi Kakizaki

Also filed as: KAKIZAKI JUNICHI

1 granted patent·137 citations·filing 1993–1993

54Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0186US5383984APlasma processing apparatus etching tunnel-typeTOKYO ELECTRON LTD·Filed 1993·Granted Jan 24, 1995·137 cites·12 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →