Inventor · disambiguated record

Masayoshi Aigo

Also filed as: AIGO MASAYOSHI

1 granted patent·13 citations·filing 1981–1981

36Inventor score

Technology areasY02P

Files withFUJITSU LTD1

Top patents by PatentIndex Score

1 record

0156US4382776AQuartz tube for thermal processing of semiconductor substratesFUJITSU LTD·Filed 1981·Granted May 10, 1983·13 cites·5 claims

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