Inventor · disambiguated record

Jeff Jang

Also filed as: JANG JEFF

1 granted patent·580 citations·filing 2001–2001

59Inventor score

Technology areasH10P

Files withAXCELIS TECH INC1

Top patents by PatentIndex Score

1 record

0195US6759098B2Plasma curing of MSQ-based porous low-k film materialsAXCELIS TECH INC·Filed 2001·Granted Jul 6, 2004·580 cites·19 claims

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