Inventor · disambiguated record

Robert Martinus Maria Mattheij

Also filed as: MATTHEIJ ROBERT M M · MATTHEIJ ROBERT MARTINUS MARIA

1 granted patent·1 pending application·0 citations·filing 2005–2006

13Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV2

Top patents by PatentIndex Score

2 records

0140US7649636B2Optical metrology system and metrology mark characterization deviceASML NETHERLANDS BV·Filed 2006·Granted Jan 19, 2010·0 cites·18 claims
0237US2007153274A1Optical metrology system and metrology mark characterization deviceASML NETHERLANDS BV·Filed 2005·Application pending·0 cites

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