Inventor · disambiguated record
Maarten Jozef Jansen
Also filed as: JANSEN MAARTEN · JANSEN MAARTEN J · JANSEN MAARTEN JOZEF
18 granted patents·2 pending applications·37 citations·filing 2006–2023
90Inventor score
Files withASML NETHERLANDS BV12JANSEN MAARTEN JOZEF3JANSEN MAARTEN J2MITUTOYO CORP2MEDICUS KATHERINE MARY1
Top patents by PatentIndex Score
20 records- 0190US11287242B2Cyclic error measurements and calibration procedures in interferometersASML NETHERLANDS BV·Filed 2017·Granted Mar 29, 2022·7 cites·20 claims
- 0284US11719529B2Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Aug 8, 2023·2 cites·15 claims
- 0382US10883816B2Position measurement system, zeroing method, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jan 5, 2021·3 cites·20 claims
- 0480US8937707B2Lithographic apparatus, device manufacturing method, and method of calibrating a displacement measuring systemJANSEN MAARTEN JOZEF·Filed 2012·Granted Jan 20, 2015·4 cites·20 claims
- 0572US8547557B2Apparatus for determining a height map of a surface through both interferometric and non-interferometric measurementsJANSEN MAARTEN JOZEF·Filed 2010·Granted Oct 1, 2013·4 cites·15 claims
- 0672US2023324164A1Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0766US8179599B2Microscope having an inclined optical axis and three-dimensional information acquisition methodJANSEN MAARTEN J·Filed 2008·Granted May 15, 2012·5 cites·15 claims
- 0865US7471396B2Dual polarization interferometers for measuring opposite sides of a workpieceMITUTOYO CORP·Filed 2007·Granted Dec 30, 2008·5 cites·8 claims
- 0964US12481226B2Interferometer system, positioning system, a lithographic apparatus, a jitter determination method, and a device manufacturing methodASML NETHERLANDS BV·Filed 2021·Granted Nov 25, 2025·0 cites·20 claims
- 1062US2025327653A1Method to determine an absolute position of a movable object, interferometer system, projection system and lithograpic apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1160US11525737B2Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer systemASML NETHERLANDS BV·Filed 2019·Granted Dec 13, 2022·0 cites·17 claims
- 1260US8576410B2Method and apparatus for determining a height of a number of spatial positions on a sampleJANSEN MAARTEN JOZEF·Filed 2010·Granted Nov 5, 2013·2 cites·19 claims
- 1359US11556066B2Stage system and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Jan 17, 2023·0 cites·18 claims
- 1458US12270647B2Method for calibration of an optical measurement system and optical measurement systemASML NETHERLANDS BV·Filed 2021·Granted Apr 8, 2025·0 cites·20 claims
- 1557US8553231B2Method and apparatus for determining the height of a number of spatial positions on a sample defining a profile of a surface through white light interferometryMEDICUS KATHERINE MARY·Filed 2010·Granted Oct 8, 2013·3 cites·15 claims
- 1656US12270644B2Compact dual pass interferometer for a plane mirror interferometerASML NETHERLANDS BV·Filed 2021·Granted Apr 8, 2025·0 cites·11 claims
- 1752US12306548B2Positioning system, a lithographic apparatus, an absolute position determination method, and a device manufacturing methodASML NETHERLANDS BV·Filed 2021·Granted May 20, 2025·0 cites·18 claims
- 1852US12305979B2Interferometer system and lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted May 20, 2025·0 cites·20 claims
- 1952US7379188B2Phase shift interferometerMITUTOYO CORP·Filed 2006·Granted May 27, 2008·2 cites·5 claims
- 2040US8289524B2Interferometer using polarization modulationJANSEN MAARTEN J·Filed 2009·Granted Oct 16, 2012·0 cites·11 claims
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