Inventor · disambiguated record

Cheng-Yua Chuang

Also filed as: CHUANG CHENG-YUA

1 granted patent·1 citations·filing 2003–2003

15Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0132US7102871B2Electrostatic chuck assembly having disassembling deviceTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Sep 5, 2006·1 cites·16 claims

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