Inventor · disambiguated record
Brett E. Mcgrath
Also filed as: MCGRATH BRETT E
2 granted patents·43 citations·filing 2002–2003
56Inventor score
Technology areasB24B
Files withASM NUTOOL INC2
Top patents by PatentIndex Score
2 records- 0191US6857947B2Advanced chemical mechanical polishing system with smart endpoint detectionASM NUTOOL INC·Filed 2003·Granted Feb 22, 2005·43 cites·49 claims
- 0235US6926589B2Chemical mechanical polishing apparatus and methods using a flexible pad and variable fluid flow for variable polishingASM NUTOOL INC·Filed 2002·Granted Aug 9, 2005·0 cites·24 claims
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