Inventor · disambiguated record
Michael Willhoff
Also filed as: WILLHOFF MICHAEL
2 granted patents·4 citations·filing 2013–2021
42Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0173US8916061B2CMP compositions selective for oxide and nitride with high removal rate and low defectivityCABOT MICROELECTRONICS CORP·Filed 2013·Granted Dec 23, 2014·4 cites·16 claims
- 0252US12116502B2Self-stopping polishing composition and method for high topological selectivityCMC MAT INC·Filed 2021·Granted Oct 15, 2024·0 cites·25 claims
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