Inventor · disambiguated record
Hermen Folken Pen
Also filed as: PEN HERMEN FOLKEN
6 granted patents·7 citations·filing 2005–2020
70Inventor score
Files withASML NETHERLANDS BV6
Top patents by PatentIndex Score
6 records- 0181US7423725B2Lithographic methodASML NETHERLANDS BV·Filed 2006·Granted Sep 9, 2008·5 cites·31 claims
- 0265US7426011B2Method of calibrating a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Sep 16, 2008·2 cites·25 claims
- 0353US12443115B2Measurement system and method for characterizing a patterning deviceASML NETHERLANDS BV·Filed 2020·Granted Oct 14, 2025·0 cites·15 claims
- 0441US8345231B2Method of determining defects in a substrate and apparatus for exposing a substrate in a lithographic processASML NETHERLANDS BV·Filed 2009·Granted Jan 1, 2013·0 cites·14 claims
- 0538US11009800B2Measurement system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted May 18, 2021·0 cites·20 claims
- 0635US11237490B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Feb 1, 2022·0 cites·17 claims
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