Inventor · disambiguated record
Bertus Johan Vleeming
Also filed as: VLEEMING BERTUS JOHAN
2 granted patents·10 citations·filing 2004–2009
48Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0163US7199863B2Method of imaging using lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Apr 3, 2007·10 cites·22 claims
- 0240US8142964B2Method of designing sets of mask patterns, sets of mask patterns, and device manufacturing methodDE PUTTER SANDER·Filed 2009·Granted Mar 27, 2012·0 cites·19 claims
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