Inventor · disambiguated record

Yong Deuk Ko

Also filed as: KO YONG DEUK

1 granted patent·1 pending application·11 citations·filing 2001–2001

36Inventor score

Technology areasH10P

Top patents by PatentIndex Score

2 records

0164US6770567B2Method of reducing particulates in a plasma etch chamber during a metal etch processFiled 2001·Granted Aug 3, 2004·11 cites·29 claims
0232US2003013314A1Method of reducing particulates in a plasma etch chamber during a metal etch processFiled 2001·Application pending·0 cites

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