Inventor · disambiguated record
Gerben Vrijburg
Also filed as: VRIJBURG GERBEN · VRIJBURG GERBEN O
3 granted patents·57 citations·filing 1998–2000
73Inventor score
Files withASM INC3
Top patents by PatentIndex Score
3 records- 0173US6331023B1Gridded substrate transport spatulaASM INC·Filed 2000·Granted Dec 18, 2001·19 cites·17 claims
- 0267US6161311ASystem and method for reducing particles in epitaxial reactorsASM INC·Filed 1998·Granted Dec 19, 2000·33 cites·13 claims
- 0363US6550158B2Substrate handling chamberASM INC·Filed 2000·Granted Apr 22, 2003·5 cites·10 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →