Inventor · disambiguated record

Puikit Agarwal

Also filed as: AGARWAL PUIKIT

1 granted patent·4 citations·filing 2018–2018

24Inventor score

Technology areasH10P

Files withLAM RES CORP1

Top patents by PatentIndex Score

1 record

0182US10832909B2Atomic layer etch, reactive precursors and energetic sources for patterning applicationsLAM RES CORP·Filed 2018·Granted Nov 10, 2020·4 cites·18 claims

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