Inventor · disambiguated record

Yasuji Matsui

Also filed as: MATSUI YASUJI

1 granted patent·67 citations·filing 1996–1996

53Inventor score

Technology areasC23C

Files withMITSUBISHI ELECTRIC CORP1

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1 record

0188US6110291AThin film forming apparatus using laserMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Aug 29, 2000·67 cites·3 claims

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