Inventor · disambiguated record
Gerardus Hubertus Petrus Maria Swinkels
Also filed as: SWINKELS GERARDUS · SWINKELS GERARDUS HUBERTUS PETRUS MARIA
34 granted patents·3 pending applications·83 citations·filing 2004–2022
95Inventor score
Files withASML NETHERLANDS BV13LOOPSTRA ERIK ROELOF7BANINE VADIM YEVGENYEVICH2KEMPEN ANTONIUS THEODORUS WILHELMUS2MESTROM WILBERT JAN2
Top patents by PatentIndex Score
37 records- 0191US8598551B2EUV radiation source comprising a droplet accelerator and lithographic apparatusMESTROM WILBERT JAN·Filed 2010·Granted Dec 3, 2013·11 cites·15 claims
- 0287US8368032B2Radiation source, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Granted Feb 5, 2013·8 cites·20 claims
- 0381US8507882B2Radiation source and lithographic apparatusSWINKELS GERARDUS HUBERTUS PETRUS MARIA·Filed 2009·Granted Aug 13, 2013·18 cites·11 claims
- 0479US9110377B2Lithographic apparatus, EUV radiation generation apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2011·Granted Aug 18, 2015·5 cites·15 claims
- 0579US8547525B2EUV radiation generation apparatusLOOPSTRA ERIK ROELOF·Filed 2010·Granted Oct 1, 2013·5 cites·19 claims
- 0676US11237491B2Reflective optical element for a radiation beamASML NETHERLANDS BV·Filed 2019·Granted Feb 1, 2022·2 cites·16 claims
- 0776US9411238B2Source-collector device, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Aug 9, 2016·4 cites·8 claims
- 0875US8368040B2Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2010·Granted Feb 5, 2013·4 cites·12 claims
- 0969US8755032B2Radiation source and lithographic apparatusYAKUNIN ANDREI MIKHAILOVICH·Filed 2009·Granted Jun 17, 2014·2 cites·25 claims
- 1065US9164403B2Radiation source, lithographic apparatus and device manufacturing methodKEMPEN ANTONIUS THEODORUS WILHELMUS·Filed 2010·Granted Oct 20, 2015·1 cites·16 claims
- 1165US8115900B2Lithographic apparatus and device manufacturing methodVAN DE VIJVER YURI JOHANNES GABRIEL·Filed 2007·Granted Feb 14, 2012·6 cites·23 claims
- 1264US7883886B2Device for cereal maltingBUEHLER AG·Filed 2004·Granted Feb 8, 2011·3 cites·20 claims
- 1361US9632419B2Radiation sourceVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2012·Granted Apr 25, 2017·2 cites·23 claims
- 1461US8946661B2Radiation source, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2012·Granted Feb 3, 2015·1 cites·20 claims
- 1556US12422758B2Lithographic apparatus, temperature sensor, and fiber Bragg grating sensorASML HOLDING NV·Filed 2022·Granted Sep 23, 2025·0 cites·17 claims
- 1656US8901521B2Module and method for producing extreme ultraviolet radiationVAN EMPEL TJARKO ADRIAAN RUDOLF·Filed 2008·Granted Dec 2, 2014·3 cites·31 claims
- 1756US8431916B2Radiation source and lithographic apparatusLOOPSTRA ERIK ROELOF·Filed 2009·Granted Apr 30, 2013·3 cites·19 claims
- 1855US10001709B2Lithographic apparatus, spectral purity filter and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jun 19, 2018·0 cites·18 claims
- 1955US9119280B2Radiation sourceKEMPEN ANTONIUS THEODORUS WILHELMUS·Filed 2011·Granted Aug 25, 2015·1 cites·15 claims
- 2053US9363879B2Module and method for producing extreme ultraviolet radiationASML NETHERLANDS BV·Filed 2014·Granted Jun 7, 2016·0 cites·19 claims
- 2153US9097982B2Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filterBANINE VADIM YEVGENYEVICH·Filed 2009·Granted Aug 4, 2015·0 cites·20 claims
- 2252US9007560B2Radiation sourceMESTROM WILBERT JAN·Filed 2012·Granted Apr 14, 2015·1 cites·13 claims
- 2352US8373846B2Radiation source, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Granted Feb 12, 2013·2 cites·20 claims
- 2451US9964852B1Source collector apparatus, lithographic apparatus and methodASML NETHERLANDS BV·Filed 2017·Granted May 8, 2018·0 cites·7 claims
- 2547US9594306B2Lithographic apparatus, spectral purity filter and device manufacturing methodBANINE VADIM YEVGENYEVICH·Filed 2011·Granted Mar 14, 2017·0 cites·17 claims
- 2646US9841680B2Source collector apparatus, lithographic apparatus and methodASML NETHERLANDS BV·Filed 2014·Granted Dec 12, 2017·0 cites·9 claims
- 2746US9414477B2Radiation source, lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2009·Granted Aug 9, 2016·1 cites·16 claims
- 2845US2011122389A1Radiation source, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 2944US8749756B2Lithographic apparatus and device manufacturing methodVAN DE VIJVER YURI JOHANNES GABRIEL·Filed 2012·Granted Jun 10, 2014·0 cites·20 claims
- 3044US8711325B2Method and system for determining a suppression factor of a suppression system and a lithographic apparatusSCHIMMEL HENDRIKUS GIJSBERTUS·Filed 2008·Granted Apr 29, 2014·0 cites·22 claims
- 3144US8462826B2Laser deviceLOOPSTRA ERIK ROELOF·Filed 2010·Granted Jun 11, 2013·0 cites·11 claims
- 3243US9648714B2Fuel system for lithographic apparatus, EUV source, lithographic apparatus and fuel filtering methodASML NETHERLANDS BV·Filed 2013·Granted May 9, 2017·0 cites·18 claims
- 3340US9091944B2Source collector, lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2010·Granted Jul 28, 2015·0 cites·18 claims
- 3438US9366967B2Radiation sourceYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Jun 14, 2016·0 cites·13 claims
- 3538US8405055B2Source module, radiation source and lithographic apparatusLABETSKI DZMITRY·Filed 2009·Granted Mar 26, 2013·0 cites·14 claims
- 3637US2011024651A1Radiation system and method, and a spectral purity filterASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 3735US2012280148A1Euv radiation source and lithographic apparatusLOOPSTRA ERIK ROELOF·Filed 2010·Application pending·0 cites
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