Inventor · disambiguated record
Sergei Rodin
Also filed as: RODIN SERGEI · RODIN SERGEI B
8 granted patents·36 citations·filing 2002–2005
82Inventor score
Top patents by PatentIndex Score
8 records- 0180US7340706B2Method and system for analyzing the quality of an OPC maskLSI LOGIC CORP·Filed 2005·Granted Mar 4, 2008·7 cites·24 claims
- 0277US7039896B2Gradient method of mask edge correctionLSI LOGIC CORP·Filed 2003·Granted May 2, 2006·18 cites·24 claims
- 0355US6911285B2Sidelobe correction for attenuated phase shift masksLSI LOGIC CORP·Filed 2002·Granted Jun 28, 2005·4 cites·15 claims
- 0454US7260814B2OPC edge correction based on a smoothed mask designLSI CORP·Filed 2004·Granted Aug 21, 2007·4 cites·21 claims
- 0547US7401318B2Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposesLSI CORP·Filed 2005·Granted Jul 15, 2008·0 cites·6 claims
- 0646US7493577B2Automatic recognition of geometric points in a target IC design for OPC mask quality calculationLSI CORP·Filed 2004·Granted Feb 17, 2009·2 cites·23 claims
- 0743US6785871B2Automatic recognition of an optically periodic structure in an integrated circuit designLSI LOGIC CORP·Filed 2002·Granted Aug 31, 2004·1 cites·17 claims
- 0840US6988260B2Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposesLSI LOGIC CORP·Filed 2003·Granted Jan 17, 2006·0 cites·15 claims
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