Inventor · disambiguated record
Pai-Hsueh Yang
Also filed as: YANG PAI-HSUEH
20 granted patents·12 pending applications·88 citations·filing 2002–2024
93Inventor score
Files withNIKON CORP18YANG PAI-HSUEH8BINNARD MICHAEL B2BINNARD MICHAEL1NIKON RES CORPORATION OF AMERICA1
Top patents by PatentIndex Score
32 records- 0189US7172493B2Fine force actuator assembly for chemical mechanical polishing apparatusesNIKON CORP·Filed 2005·Granted Feb 6, 2007·14 cites·46 claims
- 0288US7417714B2Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stageNIKON CORP·Filed 2005·Granted Aug 26, 2008·10 cites·25 claims
- 0383US6917412B2Modular stage with reaction force cancellationNIKON CORP·Filed 2003·Granted Jul 12, 2005·22 cites·45 claims
- 0481US9030057B2Method and apparatus to allow a plurality of stages to operate in close proximityBINNARD MICHAEL B·Filed 2012·Granted May 12, 2015·7 cites·12 claims
- 0580US8140288B2On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stageYANG PAI-HSUEH·Filed 2007·Granted Mar 20, 2012·6 cites·41 claims
- 0679US9465305B2Method for determining a commutation offset and for determining a compensation map for a stageYANG PAI-HSUEH·Filed 2011·Granted Oct 11, 2016·3 cites·41 claims
- 0772US7989756B2Active-isolation mounts for optical elementsNIKON CORP·Filed 2008·Granted Aug 2, 2011·3 cites·36 claims
- 0868US8582080B2Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stageBINNARD MICHAEL·Filed 2008·Granted Nov 12, 2013·2 cites·24 claims
- 0967US2025130510A1Vibration control of structural elements of exposure apparatusNIKON CORP·Filed 2024·Application pending·0 cites
- 1066US9013134B2Method for determing a commutation offset and for determining a compensation map for a stageYANG PAI-HSUEH·Filed 2011·Granted Apr 21, 2015·1 cites·20 claims
- 1165US11223303B2Motor with force constant modeling and identification for flexible mode controlNIKON RES CORPORATION OF AMERICA·Filed 2018·Granted Jan 11, 2022·1 cites·20 claims
- 1258US7034474B2Auto-calibration of attraction-only type actuator commutationsNIKON CORP·Filed 2004·Granted Apr 25, 2006·9 cites·53 claims
- 1356US6855032B1Fine force control of actuators for chemical mechanical polishing apparatusesNIKON CORP·Filed 2003·Granted Feb 15, 2005·6 cites·31 claims
- 1455US8853988B2Control systems and methods for compensating for effects of a stage motorBINNARD MICHAEL B·Filed 2009·Granted Oct 7, 2014·1 cites·10 claims
- 1551US7253576B2E/I core actuator commutation formula and control methodNIKON CORP·Filed 2004·Granted Aug 7, 2007·3 cites·32 claims
- 1644US8451431B2Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the likeYANG PAI-HSUEH·Filed 2010·Granted May 28, 2013·0 cites·21 claims
- 1743US9921495B2Magnetic sensor calibration and servo for planar motor stageNIKON CORP·Filed 2014·Granted Mar 20, 2018·0 cites·23 claims
- 1842US2013116814A1Feedforward control adjusted with iterative learningNIKON CORP·Filed 2012·Application pending·0 cites
- 1941US11092170B2Dual valve fluid actuator assemblyNIKON CORP·Filed 2018·Granted Aug 17, 2021·0 cites·21 claims
- 2041US9529353B2Methods for limiting counter-mass trim-motor force and stage assemblies incorporating sameYANG PAI-HSUEH·Filed 2011·Granted Dec 27, 2016·0 cites·24 claims
- 2141US9243969B2Method for calibrating a force constant of a motorized stage used for supporting and moving a workpieceYANG PAI-HSUEH·Filed 2011·Granted Jan 26, 2016·0 cites·15 claims
- 2241US2005197045A1Fine force control of actuators for chemical mechanical polishing apparatusesFiled 2005·Application pending·0 cites
- 2341US2006170382A1Linear motor force ripple identification and compensation with iterative learning controlNIKON CORP·Filed 2005·Application pending·0 cites
- 2440US2015241794A1Coil Switching Method for Moving Magnet Planar MotorNIKON CORP·Filed 2014·Application pending·0 cites
- 2540US2010222898A1Stage-control systems and methods including inverse closed loop with adaptive controllerNIKON CORP·Filed 2010·Application pending·0 cites
- 2640US2012319637A1Synchronization control devices and methodsYANG PAI-HSUEH·Filed 2011·Application pending·0 cites
- 2740US2013049647A1Force Distribution Method for Stage Systems Utilizing Dual ActuatorsYANG PAI-HSUEH·Filed 2012·Application pending·0 cites
- 2839US2005231706A1Feedforward control with reduced learning time for lithographic system to improve throughput and accuracyNIKON CORP·Filed 2004·Application pending·0 cites
- 2936US2004128918A1Control system and method for improving tracking accuracy of a stage through processing of information from previous operationsFiled 2003·Application pending·0 cites
- 3036US2004119964A1Double isolation fine stageNIKON CORP·Filed 2002·Application pending·0 cites
- 3135US2015241525A1Dynamic Correction to Remove the Influence of Motor Coil Flux on Hall Sensor MeasurementNIKON CORP·Filed 2014·Application pending·0 cites
- 3234US10261419B2Magnet array for moving magnet planar motorNIKON CORP·Filed 2015·Granted Apr 16, 2019·0 cites·16 claims
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