Inventor · disambiguated record
Shiang-Lung Koo
Also filed as: KOO SHIANG-LUNG
4 granted patents·1 pending application·7 citations·filing 2008–2024
65Inventor score
Top patents by PatentIndex Score
5 records- 0179US9465305B2Method for determining a commutation offset and for determining a compensation map for a stageYANG PAI-HSUEH·Filed 2011·Granted Oct 11, 2016·3 cites·41 claims
- 0272US7989756B2Active-isolation mounts for optical elementsNIKON CORP·Filed 2008·Granted Aug 2, 2011·3 cites·36 claims
- 0368US2025053105A1Systems and methods for monitoring spatial light modulator (slm) flareNIKON CORP·Filed 2024·Application pending·0 cites
- 0466US9013134B2Method for determing a commutation offset and for determining a compensation map for a stageYANG PAI-HSUEH·Filed 2011·Granted Apr 21, 2015·1 cites·20 claims
- 0544US8451431B2Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the likeYANG PAI-HSUEH·Filed 2010·Granted May 28, 2013·0 cites·21 claims
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