Inventor · disambiguated record
Mitsuru Meno
Also filed as: MENO MITSURU
1 granted patent·2 pending applications·8 citations·filing 2007–2009
30Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0174US8492276B2Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing methodABE TAICHI·Filed 2009·Granted Jul 23, 2013·8 cites·9 claims
- 0239US2010221918A1Aqueous dispersion for chemical mechanical polishing and method for preparing the same, kit for preparing aqueous dispersion for chemical mechanical polishing, and chemical mechanical polishing method for semiconductor deviceJSR CORP·Filed 2008·Application pending·0 cites
- 0338US2009325323A1Aqueous dispersion for chemical mechanical polishing, production method thereof, and chemical mechanical polishing methodJSR CORP·Filed 2007·Application pending·0 cites
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