Inventor · disambiguated record

Kuan-Luan Cheng

Also filed as: CHENG KUAN-LUAN

1 granted patent·2 citations·filing 2003–2003

19Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0141US6978191B2Overlay registration control system and method employing multiple pilot lot in-line overlay registration measurementTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Dec 20, 2005·2 cites·28 claims

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