Inventor · disambiguated record
Sachiko Yabe
Also filed as: YABE SACHIKO
8 granted patents·38 citations·filing 2000–2010
83Inventor score
Top patents by PatentIndex Score
8 records- 0178US7439171B2Method for manufacturing electronic deviceNEC ELECTRONICS CORP·Filed 2005·Granted Oct 21, 2008·9 cites·18 claims
- 0277US7332405B2Method of forming alignment marks for semiconductor device fabricationOKI ELECTRIC IND CO LTD·Filed 2005·Granted Feb 19, 2008·8 cites·19 claims
- 0369US7388651B2Focus monitoring methodOKI ELECTRIC IND CO LTD·Filed 2005·Granted Jun 17, 2008·3 cites·12 claims
- 0457US6809002B2Method of manufacturing an alignment markOKI ELECTRIC IND CO LTD·Filed 2002·Granted Oct 26, 2004·8 cites·12 claims
- 0554US6349594B1Method of measuring film thickness distributionOKI ELECTRIC IND CO LTD·Filed 2000·Granted Feb 26, 2002·8 cites·9 claims
- 0647US6572285B2Photoresist developing nozzle, photoresist developing apparatus, and photoresist developing methodOKI ELECTRIC IND CO LTD·Filed 2001·Granted Jun 3, 2003·2 cites·12 claims
- 0745US8076220B2Fabrication method for device structure having transparent dielectric substrateNAKAMURA TOSHIYUKI·Filed 2010·Granted Dec 13, 2011·0 cites·17 claims
- 0845US7745880B2Dielectric substrate with reflecting filmsOKI SEMICONDUCTOR CO LTD·Filed 2005·Granted Jun 29, 2010·0 cites·12 claims
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