Inventor · disambiguated record
Palanikumara Sakthivel
Also filed as: SAKTHIVEL PALANIKUMARA
2 granted patents·2 citations·filing 2004–2010
40Inventor score
Technology areasG01N
Top patents by PatentIndex Score
2 records- 0151US7794663B2Method and system for detection of solid materials in a plasma using an electromagnetic circuitAXCELIS TECH INC·Filed 2004·Granted Sep 14, 2010·2 cites·14 claims
- 0240US8119413B2Method and system for detection of solid materials in a plasma using an electromagnetic circuitPINGREE JR RICHARD E·Filed 2010·Granted Feb 21, 2012·0 cites·13 claims
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