Inventor · disambiguated record

Takazumi Tanaka

Also filed as: TANAKA TAKAZUMI

1 granted patent·0 citations·filing 2020–2020

6Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0143US11567485B2Substrate processing system and method for monitoring process dataTOKYO ELECTRON LTD·Filed 2020·Granted Jan 31, 2023·0 cites·9 claims

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Takazumi Tanaka — Patent Inventor | PatentIndex