Inventor · disambiguated record

Ryback Li Chang Lo

Also filed as: LO RYBACK LI CHANG

1 granted patent·1 citations·filing 2016–2016

16Inventor score

Technology areasC11D

Files withAIR PROD & CHEM1

Top patents by PatentIndex Score

1 record

0169US10072237B2Photoresist cleaning composition used in photolithography and a method for treating substrate therewithAIR PROD & CHEM·Filed 2016·Granted Sep 11, 2018·1 cites·20 claims

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