Inventor · disambiguated record
Chiu-Shan Yoo
Also filed as: YOO CHIU-SHAN
2 granted patents·4 citations·filing 2004–2005
47Inventor score
Technology areasG03F
Files withTAIWAN SEMICONDUCTOR MFG2
Top patents by PatentIndex Score
2 records- 0157US7251015B2Photolithography mask critical dimension metrology system and methodTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Jul 31, 2007·2 cites·17 claims
- 0247US7314689B2System and method for processing masks with oblique featuresTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Jan 1, 2008·2 cites·25 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →