Inventor · disambiguated record

Christine Sieler

Also filed as: SIELER CHRISTINE

1 granted patent·8 citations·filing 2001–2001

31Inventor score

Technology areasB08B

Files withZEISS CARL SMT AG1

Top patents by PatentIndex Score

1 record

0163US6936825B2Process for the decontamination of microlithographic projection exposure devicesZEISS CARL SMT AG·Filed 2001·Granted Aug 30, 2005·8 cites·21 claims

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