Inventor · disambiguated record
Tetsuji Ohsawa
Also filed as: OHSAWA Tetsuji
2 granted patents·1 pending application·0 citations·filing 2012–2022
22Inventor score
Top patents by PatentIndex Score
3 records- 0140US12147374B2Distributed control system and semiconductor inspection apparatus including sameHITACHI HIGH TECH CORP·Filed 2020·Granted Nov 19, 2024·0 cites·19 claims
- 0234US2025168092A1Distributed System and Distributed Device Which Constitutes Distributed SystemHITACHI HIGH TECH CORP·Filed 2022·Application pending·0 cites
- 0330US9077264B2Charged particle beam apparatus and electrostatic chuck apparatusOHSAWA Tetsuji·Filed 2012·Granted Jul 7, 2015·0 cites·2 claims
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