Inventor · disambiguated record

Bill Hinsberg

Also filed as: HINSBERG BILL

1 granted patent·16 citations·filing 2003–2003

37Inventor score

Technology areasG03F

Files withIBM1

Top patents by PatentIndex Score

1 record

0175US7090963B2Process for forming features of 50 nm or less half-pitch with chemically amplified resist imagingIBM·Filed 2003·Granted Aug 15, 2006·16 cites·15 claims

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