Inventor · disambiguated record
Keiji Inada
Also filed as: INADA KEIJI
3 granted patents·70 citations·filing 1994–2013
69Inventor score
Top patents by PatentIndex Score
3 records- 0187US5563706AInterferometric surface profiler with an alignment optical memberNIKON CORP·Filed 1994·Granted Oct 8, 1996·65 cites·8 claims
- 0273US8416423B2Interferometric apparatus for detecting 3D position of a diffracting objectISHII MIKIHIKO·Filed 2010·Granted Apr 9, 2013·3 cites·17 claims
- 0367US9885558B2Interferometric apparatus for detecting 3D position of a diffracting objectNIPPON KOGAKU KK·Filed 2013·Granted Feb 6, 2018·2 cites·21 claims
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