Inventor · disambiguated record

Ai-Sen Lui

Also filed as: LUI AI-SEN

1 granted patent·14 citations·filing 2002–2002

36Inventor score

Technology areasG03F

Files withTAIWAN SEMICONDUCTOR MFG1

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1 record

0170US6929901B2Method for reworking a lithographic process to provide an undamaged and residue free arc layerTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 16, 2005·14 cites·25 claims

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