Inventor · disambiguated record
Peter S. Kirlin
Also filed as: BUSKIRK PETER C VAN · KIRLIN PETER · KIRLIN PETER S · VAARTSTRA BRIAN A
36 granted patents·4,862 citations·filing 1990–2007
99Inventor score
Top patents by PatentIndex Score
36 records- 0198US5840897AMetal complex source reagents for chemical vapor depositionADVANCED TECH MATERIALS·Filed 1995·Granted Nov 24, 1998·275 cites·9 claims
- 0298US5566045AHigh-dielectric-constant material electrodes comprising thin platinum layersTEXAS INSTRUMENTS INC·Filed 1994·Granted Oct 15, 1996·151 cites·19 claims
- 0398US5453494AMetal complex source reagents for MOCVDADVANCED TECH MATERIALS·Filed 1994·Granted Sep 26, 1995·276 cites·15 claims
- 0498US5204314AMethod for delivering an involatile reagent in vapor form to a CVD reactorADVANCED TECH MATERIALS·Filed 1991·Granted Apr 20, 1993·386 cites·25 claims
- 0597US5976928AChemical mechanical polishing of FeRAM capacitorsADVANCED TECH MATERIALS·Filed 1997·Granted Nov 2, 1999·220 cites·69 claims
- 0697US5362328AApparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystemADVANCED TECH MATERIALS·Filed 1994·Granted Nov 8, 1994·417 cites·13 claims
- 0796US7323581B1Source reagent compositions and method for forming metal films on a substrate by chemical vapor depositionADVANCED TECH MATERIALS·Filed 2000·Granted Jan 29, 2008·56 cites·8 claims
- 0896US6132492ASorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sameADVANCED TECH MATERIALS·Filed 1998·Granted Oct 17, 2000·150 cites·40 claims
- 0996US6110529AMethod of forming metal films on a substrate by chemical vapor depositionADVANCED TECH MATERIALS·Filed 1995·Granted Aug 29, 2000·276 cites·38 claims
- 1096US5820664APrecursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising sameADVANCED TECH MATERIALS·Filed 1995·Granted Oct 13, 1998·266 cites·19 claims
- 1196US5581436AHigh-dielectric-constant material electrodes comprising thin platinum layersTEXAS INSTRUMENTS INC·Filed 1995·Granted Dec 3, 1996·131 cites·22 claims
- 1296US5536323AApparatus for flash vaporization delivery of reagentsADVANCED TECH MATERIALS·Filed 1994·Granted Jul 16, 1996·286 cites·4 claims
- 1396US5225561ASource reagent compounds for MOCVD of refractory films containing group IIA elementsADVANCED TECH MATERIALS·Filed 1990·Granted Jul 6, 1993·181 cites·35 claims
- 1495US5919522AGrowth of BaSrTiO3 using polyamine-based precursorsADVANCED TECH MATERIALS·Filed 1997·Granted Jul 6, 1999·149 cites·22 claims
- 1595US5711816ASource reagent liquid delivery apparatus, and chemical vapor deposition system comprising sameADVANCED TECH MATERIALS·Filed 1995·Granted Jan 27, 1998·316 cites·20 claims
- 1695US5705443AEtching method for refractory materialsADVANCED TECH MATERIALS·Filed 1995·Granted Jan 6, 1998·208 cites·26 claims
- 1795US5280012AMethod of forming a superconducting oxide layer by MOCVDADVANCED TECH MATERIALS·Filed 1992·Granted Jan 18, 1994·152 cites·19 claims
- 1893US6320213B1Diffusion barriers between noble metal electrodes and metallization layers, and integrated circuit and semiconductor devices comprising sameADVANCED TECH MATERIALS·Filed 1997·Granted Nov 20, 2001·178 cites·13 claims
- 1993US5783716APlatinum source compositions for chemical vapor deposition of platinumADVANCED TECH MATERIALS·Filed 1996·Granted Jul 21, 1998·63 cites·11 claims
- 2092US5576928AHigh-dielectric-constant material electrodes comprising thin platinum layersTEXAS INSTRUMENTS INC·Filed 1995·Granted Nov 19, 1996·80 cites·20 claims
- 2191US5679815ATantalum and niobium reagents useful in chemical vapor deposition processes, and process for depositing coatings using the sameADVANCED TECH MATERIALS·Filed 1994·Granted Oct 21, 1997·49 cites·15 claims
- 2289US6126996AMetal complex source reagents for chemical vapor depositionADVANCED TECH MATERIALS·Filed 1997·Granted Oct 3, 2000·87 cites·50 claims
- 2389US6019823ASorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge membersADVANCED TECH MATERIALS·Filed 1998·Granted Feb 1, 2000·81 cites·18 claims
- 2486US6162712APlatinum source compositions for chemical vapor deposition of platinumADVANCED TECH MATERIALS·Filed 1998·Granted Dec 19, 2000·63 cites·19 claims
- 2585US6072689AFerroelectric capacitor and integrated circuit device comprising sameADVANCED TECH MATERIALS·Filed 1999·Granted Jun 6, 2000·62 cites·28 claims
- 2684US5961697ABulk storage and dispensing system for fluidsADVANCED TECH MATERIALS·Filed 1997·Granted Oct 5, 1999·64 cites·20 claims
- 2782US6204180B1Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent deliveryADVANCED TECH MATERIALS·Filed 1997·Granted Mar 20, 2001·45 cites·39 claims
- 2881US5677002AChemical vapor deposition of tantalum- or niobium-containing coatingsADVANCED TECH MATERIALS·Filed 1995·Granted Oct 14, 1997·49 cites·20 claims
- 2979US6846424B2Plasma-assisted dry etching of noble metal-based materialsADVANCED TECH MATERIALS·Filed 2001·Granted Jan 25, 2005·24 cites·48 claims
- 3079US6709610B2Isotropic dry cleaning process for noble metal integrated circuit structuresADVANCED TECH MATERIALS·Filed 2001·Granted Mar 23, 2004·14 cites·17 claims
- 3174US6033919AMethod of forming sidewall capacitance structureTEXAS INSTRUMENTS INC·Filed 1997·Granted Mar 7, 2000·35 cites·17 claims
- 3273US5923970AMethod of fabricating a ferrolelectric capacitor with a graded barrier layer structureADVANCED TECH MATERIALS·Filed 1997·Granted Jul 13, 1999·35 cites·16 claims
- 3372US8299286B2Source reagent compositions and method for forming metal films on a substrate by chemical vapor depositionGARDINER ROBIN A·Filed 2007·Granted Oct 30, 2012·2 cites·9 claims
- 3456US5122509AHigh temperature superconductor/diamond composite article, and method of making the sameADVANCED TECH MATERIALS·Filed 1990·Granted Jun 16, 1992·17 cites·24 claims
- 3551US5337651AApparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquidsADVANCED TECH MATERIALS·Filed 1993·Granted Aug 16, 1994·11 cites·6 claims
- 3644US5431957AApparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquidsADVANCED TECH MATERIALS·Filed 1994·Granted Jul 11, 1995·7 cites·7 claims
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