Inventor · disambiguated record
Todd Bednarek
Also filed as: BEDNAREK TODD · BEDNAREK TODD J
6 granted patents·36 citations·filing 1994–2004
79Inventor score
Top patents by PatentIndex Score
6 records- 0169US6934005B2Reticle focus measurement method using multiple interferometric beamsASML HOLDING NV·Filed 2002·Granted Aug 23, 2005·9 cites·19 claims
- 0259US6845287B2Method, system, and computer program product for improved trajectory planning and executionASML HOLDING NV·Filed 2002·Granted Jan 18, 2005·6 cites·29 claims
- 0351US5572316AAnalog sun sensorEDO CORP BARNES ENGINEERING DI·Filed 1994·Granted Nov 5, 1996·19 cites·7 claims
- 0450US6850330B2Reticle focus measurement system using multiple interferometric beamsASML HOLDING NV·Filed 2003·Granted Feb 1, 2005·2 cites·7 claims
- 0543US7389155B2Method and system for improved trajectory planning and executionASML HOLDING NV·Filed 2004·Granted Jun 17, 2008·0 cites·19 claims
- 0639US7016051B2Reticle focus measurement system using multiple interferometric beamsASML HOLDING NV·Filed 2004·Granted Mar 21, 2006·0 cites·26 claims
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