Inventor · disambiguated record

Han Qingyuan

Also filed as: QINGYUAN HAN

1 granted patent·30 citations·filing 2001–2001

45Inventor score

Technology areasH10P

Files withAXCELIS TECHNOLOGY INC1

Top patents by PatentIndex Score

1 record

0179US6834656B2Plasma process for removing polymer and residues from substratesAXCELIS TECHNOLOGY INC·Filed 2001·Granted Dec 28, 2004·30 cites·21 claims

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Han Qingyuan — Patent Inventor | PatentIndex