Inventor · disambiguated record
Tadakazu Matsunaga
Also filed as: MATSUNAGA TADAKAZU
1 granted patent·2 pending applications·3 citations·filing 2003–2012
25Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0149US2010089323A1Method for coating internal member having holes in vacuum processing apparatus and the internal member having holes coated by using the coating methodTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0246US7604845B2Method for coating internal member having holes in vacuum processing apparatus and the internal member having holes coated by using the coating methodTOKYO ELECTRON LTD·Filed 2003·Granted Oct 20, 2009·3 cites·4 claims
- 0342US2012200051A1Method for coating internal member having holes in vacuum processing apparatus and the internal member having holes coated by using the coating methodTAKEUCHI JUN·Filed 2012·Application pending·0 cites
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