Inventor · disambiguated record
Kimio Kitamura
Also filed as: KITAMURA KIMIO
5 granted patents·10 citations·filing 2001–2008
72Inventor score
Top patents by PatentIndex Score
5 records- 0168US7863204B2Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structureHITACHI INT ELECTRIC INC·Filed 2006·Granted Jan 4, 2011·3 cites·22 claims
- 0267US8158911B2Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending memberHAYASHIDA AKIRA·Filed 2008·Granted Apr 17, 2012·3 cites·19 claims
- 0363US8116618B2Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devicesHAYASHIDA AKIRA·Filed 2008·Granted Feb 14, 2012·2 cites·14 claims
- 0458US9184069B2Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulatorHAYASHIDA AKIRA·Filed 2008·Granted Nov 10, 2015·1 cites·18 claims
- 0550US6492628B2Heater supporting structure and heating furnace for bending a glass sheetASAHI GLASS CO LTD·Filed 2001·Granted Dec 10, 2002·1 cites·6 claims
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