Inventor · disambiguated record
Yimbun P. Kwan
Also filed as: KWAN YIMBUN P
2 granted patents·27 citations·filing 2000–2004
62Inventor score
Technology areasH10P
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0173US6875992B2Position measuring device, position measuring system, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 5, 2005·15 cites·20 claims
- 0268US6894261B2Position measuring system for use in lithographic apparatusASML NETHERLANDS BV·Filed 2000·Granted May 17, 2005·12 cites·23 claims
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