Inventor · disambiguated record
Robert K. Berglund
Also filed as: BERGLUND ROBERT · BERGLUND ROBERT K
3 granted patents·183 citations·filing 1986–1991
76Inventor score
Files withMOTOROLA INC3
Top patents by PatentIndex Score
3 records- 0190US4902377ASloped contact etch processMOTOROLA INC·Filed 1989·Granted Feb 20, 1990·106 cites·13 claims
- 0279US4698128ASloped contact etch processMOTOROLA INC·Filed 1986·Granted Oct 6, 1987·64 cites·22 claims
- 0341US5250165AControlled isotropy reactive ion etcher for multi-stepped sloped contact etch processMOTOROLA INC·Filed 1991·Granted Oct 5, 1993·13 cites·10 claims
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