Inventor · disambiguated record

Eric J. Malstrom

Also filed as: MALSTROM ERIC J

1 granted patent·385 citations·filing 2006–2006

58Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0194US7910494B2Thermal processing furnace, gas delivery system therefor, and methods for delivering a process gas theretoTOKYO ELECTRON LTD·Filed 2006·Granted Mar 22, 2011·385 cites·14 claims

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