Inventor · disambiguated record

Jen-Yung Tseng

Also filed as: TSENG JEN-YUNG

1 granted patent·4 citations·filing 2001–2001

24Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0147US6723654B2Method and apparatus for in-situ descum/hot bake/dry etch photoresist/polyimide layerTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Apr 20, 2004·4 cites·10 claims

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