Inventor · disambiguated record

Juei-Wen Lin

Also filed as: LIN JUEI-WEN

2 granted patents·21 citations·filing 2001–2001

58Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG2

Top patents by PatentIndex Score

2 records

0170US6489227B1Method of etching a polysilicon layer during the stripping of the photoresist shape used as an etch mask to create an opening to an underlying fuse structureTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Dec 3, 2002·17 cites·20 claims
0247US6723654B2Method and apparatus for in-situ descum/hot bake/dry etch photoresist/polyimide layerTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Apr 20, 2004·4 cites·10 claims

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