Inventor · disambiguated record
Peter De Groot
Also filed as: DE GROOT PETER · DE GROOT PETER J · GROOT PETER DE
126 granted patents·3 pending applications·5,026 citations·filing 1988–2022
99Inventor score
Top patents by PatentIndex Score
129 records- 0199US5398113AMethod and apparatus for surface topography measurement by spatial-frequency analysis of interferogramsZYGO CORP·Filed 1993·Granted Mar 14, 1995·321 cites·33 claims
- 0298US7428057B2Interferometer for determining characteristics of an object surface, including processing and calibrationZYGO CORP·Filed 2006·Granted Sep 23, 2008·75 cites·48 claims
- 0398US7324210B2Scanning interferometry for thin film thickness and surface measurementsZYGO CORP·Filed 2004·Granted Jan 29, 2008·103 cites·35 claims
- 0498US7315382B2Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structuresZYGO CORP·Filed 2006·Granted Jan 1, 2008·62 cites·76 claims
- 0598US6195168B1Infrared scanning interferometry apparatus and methodZYGO CORP·Filed 2000·Granted Feb 27, 2001·180 cites·51 claims
- 0697US7446882B2Interferometer for determining characteristics of an object surfaceZYGO CORP·Filed 2006·Granted Nov 4, 2008·45 cites·25 claims
- 0797US7324214B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2006·Granted Jan 29, 2008·102 cites·56 claims
- 0897US7139081B2Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structuresZYGO CORP·Filed 2003·Granted Nov 21, 2006·83 cites·53 claims
- 0997US7106454B2Profiling complex surface structures using scanning interferometryZYGO CORP·Filed 2004·Granted Sep 12, 2006·87 cites·71 claims
- 1097US7012700B2Interferometric optical systems having simultaneously scanned optical path length and focusZYGO CORP·Filed 2003·Granted Mar 14, 2006·138 cites·49 claims
- 1197US6714307B2Measurement of complex surface shapes using a spherical wavefrontZYGO CORP·Filed 2002·Granted Mar 30, 2004·92 cites·89 claims
- 1296US10591284B2Metrology of multi-layer stacksZYGO CORP·Filed 2019·Granted Mar 17, 2020·14 cites·40 claims
- 1396US7616323B2Interferometer with multiple modes of operation for determining characteristics of an object surfaceZYGO CORP·Filed 2006·Granted Nov 10, 2009·37 cites·67 claims
- 1496US7239398B2Profiling complex surface structures using height scanning interferometryZYGO CORP·Filed 2006·Granted Jul 3, 2007·36 cites·20 claims
- 1596US6822745B2Optical systems for measuring form and geometric dimensions of precision engineered partsZYGO CORP·Filed 2001·Granted Nov 23, 2004·97 cites·47 claims
- 1696US6313918B1Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersionZYGO CORP·Filed 1999·Granted Nov 6, 2001·130 cites·94 claims
- 1795US9746348B2Double pass interferometric encoder systemZYGO CORP·Filed 2015·Granted Aug 29, 2017·8 cites·48 claims
- 1895US7869057B2Multiple-angle multiple-wavelength interferometer using high-NA imaging and spectral analysisZYGO CORP·Filed 2007·Granted Jan 11, 2011·36 cites·25 claims
- 1995US7289225B2Surface profiling using an interference pattern matching templateZYGO CORP·Filed 2004·Granted Oct 30, 2007·48 cites·56 claims
- 2095US6249351B1Grazing incidence interferometer and methodZYGO CORP·Filed 1999·Granted Jun 19, 2001·150 cites·88 claims
- 2194US7684049B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2008·Granted Mar 23, 2010·18 cites·10 claims
- 2294US7068376B2Interferometry method and apparatus for producing lateral metrology imagesZYGO CORP·Filed 2003·Granted Jun 27, 2006·63 cites·38 claims
- 2394US6989905B2Phase gap analysis for scanning interferometryZYGO CORP·Filed 2003·Granted Jan 24, 2006·61 cites·48 claims
- 2494US6201609B1Interferometers utilizing polarization preserving optical systemsZYGO CORP·Filed 1999·Granted Mar 13, 2001·119 cites·54 claims
- 2594US5671050AMethod and apparatus for profiling surfaces using diffracative opticsZYGO CORP·Filed 1994·Granted Sep 23, 1997·99 cites·45 claims
- 2694US5371587AChirped synthetic wavelength laser radarBOEING CO·Filed 1992·Granted Dec 6, 1994·132 cites·12 claims
- 2793US8902431B2Low coherence interferometry with scan error correctionZYGO CORP·Filed 2013·Granted Dec 2, 2014·13 cites·24 claims
- 2893US8379218B2Fiber-based interferometer system for monitoring an imaging interferometerZYGO CORP·Filed 2009·Granted Feb 19, 2013·20 cites·35 claims
- 2993US8300233B2Interferometric encoder systemsDECK LESLIE L·Filed 2011·Granted Oct 30, 2012·14 cites·66 claims
- 3093US7948636B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2010·Granted May 24, 2011·17 cites·39 claims
- 3193US7321431B2Method and system for analyzing low-coherence interferometry signals for information about thin film structuresZYGO CORP·Filed 2006·Granted Jan 22, 2008·28 cites·46 claims
- 3293US7271918B2Profiling complex surface structures using scanning interferometryZYGO CORP·Filed 2004·Granted Sep 18, 2007·57 cites·83 claims
- 3393US7046371B2Interferometer having a coupled cavity geometry for use with an extended sourceZYGO CORP·Filed 2003·Granted May 16, 2006·63 cites·47 claims
- 3493US6525825B2Interferometer and method for measuring the refractive index and optical path length effects of airZYGO CORP·Filed 2002·Granted Feb 25, 2003·47 cites·2 claims
- 3593US6252667B1Interferometer having a dynamic beam steering assemblyZYGO CORP·Filed 1998·Granted Jun 26, 2001·101 cites·94 claims
- 3692US9658129B2Method and system for determining information about a transparent optical element comprising a lens portion and a plane parallel portionZYGO CORP·Filed 2015·Granted May 23, 2017·6 cites·18 claims
- 3792US7924435B2Apparatus and method for measuring characteristics of surface featuresZYGO CORP·Filed 2007·Granted Apr 12, 2011·28 cites·65 claims
- 3892US7884947B2Interferometry for determining characteristics of an object surface, with spatially coherent illuminationZYGO CORP·Filed 2007·Granted Feb 8, 2011·26 cites·47 claims
- 3992US7456975B2Methods and systems for interferometric analysis of surfaces and related applicationsZYGO CORP·Filed 2007·Granted Nov 25, 2008·8 cites·25 claims
- 4092US7403289B2Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structuresZYGO CORP·Filed 2007·Granted Jul 22, 2008·18 cites·37 claims
- 4192US7298494B2Methods and systems for interferometric analysis of surfaces and related applicationsZYGO CORP·Filed 2004·Granted Nov 20, 2007·32 cites·41 claims
- 4292US7292346B2Triangulation methods and systems for profiling surfaces through a thin film coatingZYGO CORP·Filed 2004·Granted Nov 6, 2007·27 cites·15 claims
- 4392US6909509B2Optical surface profiling systemsZYGO CORP·Filed 2001·Granted Jun 21, 2005·52 cites·68 claims
- 4492US6529279B2Interferometer and method for measuring the refractive index and optical path length effects of airZYGO CORP·Filed 2002·Granted Mar 4, 2003·43 cites·6 claims
- 4592US6208424B1Interferometric apparatus and method for measuring motion along multiple axesZYGO CORP·Filed 1998·Granted Mar 27, 2001·96 cites·54 claims
- 4692US5488477AMethods and apparatus for profiling surfaces of transparent objectsZYGO CORP·Filed 1993·Granted Jan 30, 1996·81 cites·31 claims
- 4792US5473434APhase shifting interferometer and method for surface topography measurementZYGO CORP·Filed 1994·Granted Dec 5, 1995·80 cites·10 claims
- 4891US7948637B2Error compensation in phase shifting interferometryZYGO CORP·Filed 2009·Granted May 24, 2011·22 cites·37 claims
- 4991US7812963B2Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structuresZYGO CORP·Filed 2008·Granted Oct 12, 2010·11 cites·34 claims
- 5091US6778280B2Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam componentsZYGO CORP·Filed 2002·Granted Aug 17, 2004·48 cites·48 claims
Showing the top 50 of 129 patent records by PatentIndex Score.
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