Inventor · disambiguated record

Jen-Shian Shieh

Also filed as: SHIEH JEN-SHIAN

1 granted patent·8 citations·filing 2004–2004

31Inventor score

Technology areasG03F

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0164US7144673B2Effective photoresist stripping process for high dosage and high energy ion implantationTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Dec 5, 2006·8 cites·19 claims

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