Inventor · disambiguated record
Sunao Muraoka
Also filed as: MURAOKA SUNAO
4 granted patents·2 pending applications·205 citations·filing 1996–2011
74Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0192US5913978AApparatus and method for regulating pressure in two chambersTOKYO ELECTRON LTD·Filed 1996·Granted Jun 22, 1999·200 cites·13 claims
- 0274US7993488B2Microwave plasma processing device and gate valve for microwave plasma processing deviceTOKYO ELECTRON LTD·Filed 2007·Granted Aug 9, 2011·4 cites·12 claims
- 0359US8318267B2Method and apparatus for forming silicon oxide filmKABE YOSHIRO·Filed 2007·Granted Nov 27, 2012·1 cites·14 claims
- 0449US2009041568A1Substrate processing apparatus, substrate placing table used for same, and member exposed to plasmaTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 0546US2011253311A1Substrate processing apparatus for performing plasma processTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
- 0640US8293067B2Microwave plasma processing device and gate valve for microwave plasma processing deviceMURAOKA SUNAO·Filed 2011·Granted Oct 23, 2012·0 cites·6 claims
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