Inventor · disambiguated record
Munehiro Shibuya
Also filed as: SHIBUYA MUNEHIRO
18 granted patents·5 pending applications·334 citations·filing 1991–2019
94Inventor score
Files withSEIKO EPSON CORP9MATSUSHITA ELECTRIC INDUSTRIAL CO LTD6TOKYO ELECTRON LTD3KIKUCHI AKIHIRO2EPSON TOYOCOM CORP1
Top patents by PatentIndex Score
23 records- 0194US8387562B2Plasma processor and plasma processing methodKIKUCHI AKIHIRO·Filed 2011·Granted Mar 5, 2013·22 cites·12 claims
- 0293US9437402B2Plasma processor and plasma processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Sep 6, 2016·11 cites·9 claims
- 0393US8056503B2Plasma procesor and plasma processing methodKIKUCHI AKIHIRO·Filed 2002·Granted Nov 15, 2011·47 cites·31 claims
- 0492US8904957B2Plasma processor and plasma processing methodTOKYO ELECTRON LTD·Filed 2013·Granted Dec 9, 2014·12 cites·2 claims
- 0587US10761483B2Mechanical part, timepiece, and method of manufacturing a mechanical partSEIKO EPSON CORP·Filed 2018·Granted Sep 1, 2020·3 cites·11 claims
- 0687US5203925AApparatus for producing a thin film of tantalum oxideMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1992·Granted Apr 20, 1993·64 cites·4 claims
- 0786US10747177B2Mechanical component, timepiece, and manufacturing method of mechanical componentSEIKO EPSON CORP·Filed 2018·Granted Aug 18, 2020·3 cites·17 claims
- 0885US9728381B2Plasma processor and plasma processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Aug 8, 2017·4 cites·3 claims
- 0983US6518494B1Silicon structure, method for producing the same, and solar battery using the silicon structureMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1996·Granted Feb 11, 2003·64 cites·10 claims
- 1082US5470398ADielectric thin film and method of manufacturing sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1991·Granted Nov 28, 1995·50 cites·5 claims
- 1176US7672046B2Optical multilayer filter, method for manufacturing the same, and electronic apparatusSEIKO EPSON CORP·Filed 2007·Granted Mar 2, 2010·2 cites·7 claims
- 1274US10747178B2Mechanical component and timepieceSEIKO EPSON CORP·Filed 2018·Granted Aug 18, 2020·1 cites·24 claims
- 1370US5431733ALow vapor-pressure material feeding apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1993·Granted Jul 11, 1995·30 cites·12 claims
- 1461US11467538B2Watch component, movement and watchSEIKO EPSON CORP·Filed 2019·Granted Oct 11, 2022·0 cites·7 claims
- 1559US7990616B2IR-UV cut multilayer filter with dust repellent propertyEPSON TOYOCOM CORP·Filed 2008·Granted Aug 2, 2011·2 cites·8 claims
- 1657US11693365B2Watch component, movement, watch and method for manufacturing watch componentSEIKO EPSON CORP·Filed 2019·Granted Jul 4, 2023·0 cites·6 claims
- 1757US5766342AMethod for forming silicon film and silicon film forming apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1995·Granted Jun 16, 1998·19 cites·23 claims
- 1855US11868088B2Timepiece component, timepiece movement, and timepieceSEIKO EPSON CORP·Filed 2018·Granted Jan 9, 2024·0 cites·5 claims
- 1941US2006177638A1Optical component and method for manufacturing the sameSEIKO EPSON CORP·Filed 2006·Application pending·0 cites
- 2040US2003106581A1Silicon structure, method for producing the same, and solar battery using the silicon structureMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Application pending·0 cites
- 2140US2018150029A1Mechanical component, timepiece, manufacturing method of mechanical component, and manufacturing method of timepieceSEIKO EPSON CORP·Filed 2017·Application pending·0 cites
- 2235US2002179589A1Lamp annealing device and substrate for a display elementFiled 2001·Application pending·0 cites
- 2330US2002005159A1Method of producing thin semiconductor film and apparatus thereforFiled 1998·Application pending·0 cites
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