Inventor · disambiguated record

Shiaw-Rong Chen

Also filed as: CHEN SHIAW-RONG

1 granted patent·61 citations·filing 1997–1997

50Inventor score

Technology areasH10P

Files withUNITED MICROELECTRONICS CORP1

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1 record

0177US5883014AMethod for treating via sidewalls with hydrogen plasmaUNITED MICROELECTRONICS CORP·Filed 1997·Granted Mar 16, 1999·61 cites·10 claims

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