Inventor · disambiguated record
Rogier Martin Lambert Ellenbroek
Also filed as: ELLENBROEK ROGIER · ELLENBROEK ROGIER MARTIN LAMBERT
2 granted patents·16 citations·filing 2004–2012
51Inventor score
Top patents by PatentIndex Score
2 records- 0165US7181296B2Method of adaptive interactive learning control and a lithographic manufacturing process and apparatus employing such a methodASML NETHERLANDS BV·Filed 2004·Granted Feb 20, 2007·16 cites·20 claims
- 0247US8905369B2Vibration isolation module and substrate processing systemPEIJSTER JERRY JOHANNES MARTINUS·Filed 2012·Granted Dec 9, 2014·0 cites·19 claims
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